Whittemore Hall 633
Device Testing Lab, CPES
Keysight B1505 Power Device Analyzer
CascadeMicroTech Probe Station (10 kV, 300 A, -40-300 oC)
N1265A Curve Tracer (10 kV, 500 A)
High-Voltage Pulse Measurement System (1200 V, 10 A, 1 us)
Whittemore Hall 633
Cleanroom, ECE department
Trion PECVD
Trion RIE
DRIE
Wet Bench
PVD
MA-6 Mask Aligner
Dektak
HMDS oven
Spinner
Filmetrics
Maskless Aligner
Whittemore Hall 617
Device characterization Lab, ECE department
Ellipsometer
AFM
Keithely Probe Station
Nanoscale Characterization and Fabrication Laboratory, Virginia Tech
SEM
FIB
SIMS
TEM